Tegam is a globally recognised brand within Advanced Energy, specialising in RF measurement instrumentation, metrology-grade calibration systems, and process power validation tools. With decades of expertise in high-frequency measurement and diagnostics, Tegam plays a vital role in enabling stable, repeatable RF power delivery across a range of critical applications—including semiconductor plasma etching, thin film deposition, and industrial plasma processing.
Their solutions are trusted by OEMs and fabs around the world to ensure process consistency, tool uptime, and product quality in high-precision manufacturing.
Whether you’re optimising a new plasma tool or validating legacy RF equipment, we can help you achieve maximum process performance and stability.
Tegam focuses on RF process power measurement and calibration technologies that bring reliability, accuracy, and traceability to the forefront of industrial and semiconductor processing.
Core capabilities include:
- RF Power Sensors & Meters: High-accuracy measurement of forward and reflected RF power
- Calibration Transfer Standards: Industry-leading systems for calibrating and verifying power delivery systems
- Process Power Validation Tools: Instruments that help validate tool performance and process repeatability
- High-Speed Data Logging & Analysis: For real-time diagnostics and predictive maintenance
- Metrology-grade systems: Supporting traceability to NIST and international standards
Tegam’s products are engineered to meet the exacting demands of cleanroom and production environments, ensuring that every watt of power delivered is controlled with unmatched precision and repeatability.
We offer full access to Tegam’s advanced technologies, backed by our own technical expertise and local application support. Our engineers work closely with customers to select, integrate, and support the right Tegam solutions for their RF process control needs.
We help ensure:
- The correct sensor or meter is specified for your application
- Calibration tools are matched to your process requirements
- Your systems remain traceable, repeatable, and compliant with industry standards
- Technical guidance and support throughout product life cycles
Key facts
- Company
- Tegam / Advanced Energy
- Headquarters
- United States
- Technologies
- Meters
