Discover our range of technologies
Charged plate monitors
Charged plate monitors are premier instruments for evaluating the performance of air ionisation systems. Our charged plate monitors have the ability to store test data, test time and date, the particular ioniser from which the data was obtained, and waveforms for hundreds of ioniser tests.
These charged plate monitors are suitable for semiconductors, disk drives, LCDs, and many other manufacturing environments that are sensitive to static charge. It can be used to test all types of ionisers including room ionisation systems, AC and DC blowers, nuclear ionisers, gun-type ionisers, and pulsed DC ionisers. They are also useful in material evaluation for testing dissipative qualities.
Chuck power supplies
Our software-driven electrostatic chuck power supplies offer an array of features that provide significant benefits while accommodating a variety of demanding applications. Documented use shows that customers have seen increases in efficiency and throughput equal to three times that of other supplies. Additionally, our models virtually eliminate sticky wafer and wafer popping issues, thus ensuring better control over particle contamination.
The lockable front panel interface of these amplifiers/supplies optimises many processes by enabling the operator to control parameters such as over-current, wafer-present, and wafer-clamped thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset control. The dynamic features also enable electrostatic chuck profiles to be uploaded to the unit via a user-friendly software interface. The profiles, which are stored internally using non-volatile memory, are used to effectively chuck and de-chuck the wafer. Both Coulombic and Johnsen-Rahbek electrostatic chuck technologies are supported.
Given the versatility of electrostatic chuck power supplies and its dial-in performance, the unit can be used in multiple unique tools/processes, therefore, eliminating the need to specify a new supply for each unique tool/process in a facility.
When it comes to developing custom solutions for tomorrow's technologies, we trust our approach to deliver the best possible outcome.
Our engineers will skilfully guide you through each stage of your project, working with you to understand and identify a solution that meets your technical and commercial needs before designing and integrating your solution.
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Technological expertise across your application lifecycle.FIND OUT HOW
Our solutions and expertise are centred around six key markets
Over the years we have built up considerable knowledge and knowhow, providing tailored solutions for our customers.
- Industrial and Connectivity
- Renewable energy
- Aerospace and Defence
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