USB-enabled Energy Sensor, 90µJ-100mJ, 400Hz, MaxBlack Coating for 193nm

Manufacturer's part number :


Manufacturer Coherent


Description :

EnergyMax-USB J-25MUV-193 sensor is specifically optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This EnergyMax-USB J-50MUV-193 sensor feature high accuracy and large active areas (up to 25 mm), and use a unique coating called MaxUV that delivers superior long-term damage resistance.

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  • Quote and availability


  • Energy Range: 90 µJ to 100 mJ
  • Noise Equivalent Energy: <9 µJ
  • Wavelength Range: 0.19 to 2.1µm
  • Active Area Diameter: 25 mm
  • Maximum Average Power: 5 W
  • Maximum Pulse Width: 43 µs
  • Maximum Rep. Rate (pps): 500
  • Maximum Energy Density: 200 mJ/cm²(at 193 nm, 10 ns)
  • Detector Coating: MaxBlack
  • Cable Type: USB 3m length
  • Benefits

  • Unique MaxUV coating delivers highest DUV damage threshold and long-term UV exposure resistance
  • Operate over the 190 nm to 2.1 μm range
  • Enable pulse energy measurements from 90 μJ to 1J
  • Measure up to 400 Hz repetition rate
  • Spectral compensation characteristics built into each unit
  • Onboard sensors provide automatic temperature compensation
Features Similar products
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Meter type Stand-alone USB-RS  
Spectral Range UV (150-400nm)  
VIS (400-700nm)  
NIR (750nm-3µm)  
Operating Mode Pulsed  
Energy Range 1-1000µJ  
Aperture Dimensions (mm) 15-55