Excimer Pyroelectric Energy Sensor, 50µJ-100mJ, 400Hz, 25mm Aperture, MaxUV coating for 193nm

Manufacturer's part number :


Manufacturer Coherent


Description :

J-25MUV-193 MaxUV-coated EnergyMax sensor is specifically optimized for use with ArF lasers operating at 193 nm. J-25MUV-193 MaxUV-coated EnergyMax sensor feature high accuracy and large active areas (up to 50 mm), and use a unique coating called MaxUV that delivers superior long-term damage resistance.

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  • Energy Range: 50 µJ to 100 mJ
  • Noise Equivalent Energy: <2 µJ
  • Wavelength Range: 0.19 to 2.1µm
  • Active Area Diameter: 25 mm
  • Maximum Average Power: 5 W
  • Maximum Pulse Width: 43 µs
  • Maximum Rep. Rate (pps): 500
  • Maximum Energy Density: 200 mJ/cm² (at 193 nm, 10 ns)
  • Detector Coating: MAxUV
Features Similar products
Sensor Type Pyroelectric  

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Spectral Range UV (150-400nm)  
VIS (400-700nm)  
Operating Mode Pulsed  
Energy Range 1-1000µJ  
Aperture Dimensions (mm) 15-55