Ellipsometer System, SpecEl-2000-VIS

Ocean Optics SpecEl Ellipsometer System

Manufacturer's part number :

SpecEl Ellipsometer System

Manufacturer Ocean Optics

Ocean Optics

Description :

The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button.

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  • Wavelength range: 380-780 nm (standard) or 450-900 nm (optional)
  • Accuracy: 0.1 nm thickness; 0.005% refractive index
  • Optical resolution: 4.0 nm FWHM
  • Film thickness: 1-5000 nm for single transparent film
  • Number of layers: Up to 32 layers
  • Spot size: 2 mm x 4 mm (standard) or 200 µm x 400 µm (optional)